Inventor

YEO WEE KWONG

SG2 patents

Patents

2 patents

US9064084B2Jun 23, 2015

Topography driven OPC and lithography flow

GLOBALFOUNDRIES SG PTE LTD2 citations53

US9026954B2May 5, 2015

Surface topography enhanced pattern (STEP) matching

GLOBALFOUNDRIES SG PTE LTD3 citations51