Inventor
KACHIAN JESSICA SEVANNE
US5 patents
Patents
5 patentsUS9711366B2Jul 18, 2017
Selective etch for metal-containing materials
APPLIED MATERIALS INC115 citations98
US9472417B2Oct 18, 2016
Plasma-free metal etch
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US9299582B2Mar 29, 2016
Selective etch for metal-containing materials
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US10366878B2Jul 30, 2019
Selective deposition through formation of self-assembled monolayers
APPLIED MATERIALS INC1 citations62
US9685325B2Jun 20, 2017
Carbon and/or nitrogen incorporation in silicon based films using silicon precursors with organic co-reactants by PE-ALD
APPLIED MATERIALS INC0 citations51