Inventor

KARAKAMA AKIRA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KARAKAMA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US7916926B2Mar 29, 2011

Semiconductor inspection apparatus

HITACHI HIGH TECH CORP7 citations76

US10636620B2Apr 28, 2020

Charged particle beam device and control method of charged particle beam device

HITACHI HIGH TECH CORP0 citations39

FURUHASHI KANJI

1 patent

US8168950B2May 1, 2012

Charged particle beam apparatus, and image generation method with charged particle beam apparatus

FURUHASHI KANJI10 citations74