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Inventor

DEGROOT MARTY W

US34 patents
⚠️ This page may combine multiple inventors who share the name “DEGROOT MARTY W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC

14 patents
US9484212B1Nov 1, 2016

Chemical mechanical polishing method

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC12 citations84
US12491604B2Dec 9, 2025

Chemical mechanical polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations62
US11396081B2Jul 26, 2022

Chemical mechanical polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations62
US10464187B2Nov 5, 2019

High removal rate chemical mechanical polishing pads from amine initiated polyol containing curatives

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC1 citations60
US11524390B2Dec 13, 2022

Methods of making chemical mechanical polishing layers having improved uniformity

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations47
US9446497B2Sep 20, 2016

Broad spectrum, endpoint detection monophase olefin copolymer window with specific composition in multilayer chemical mechanical polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations40
US10144115B2Dec 4, 2018

Method of making polishing layer for chemical mechanical polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10105825B2Oct 23, 2018

Method of making polishing layer for chemical mechanical polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10005172B2Jun 26, 2018

Controlled-porosity method for forming polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US9776300B2Oct 3, 2017

Chemical mechanical polishing pad and method of making same

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US9586305B2Mar 7, 2017

Chemical mechanical polishing pad and method of making same

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10722999B2Jul 28, 2020

High removal rate chemical mechanical polishing pads and methods of making

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US9731398B2Aug 15, 2017

Polyurethane polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations35
US10875144B2Dec 29, 2020

Chemical mechanical polishing pad

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations34

ROHM & HAAS ELECT MAT

13 patents
US9333620B2May 10, 2016

Chemical mechanical polishing pad with clear endpoint detection window

ROHM & HAAS ELECT MAT28 citations94
US9314897B2Apr 19, 2016

Chemical mechanical polishing pad with endpoint detection window

ROHM & HAAS ELECT MAT29 citations94
US9259821B2Feb 16, 2016

Chemical mechanical polishing layer formulation with conditioning tolerance

ROHM & HAAS ELECT MAT29 citations94
US9259820B2Feb 16, 2016

Chemical mechanical polishing pad with polishing layer and window

ROHM & HAAS ELECT MAT36 citations92
US8980749B1Mar 17, 2015

Method for chemical mechanical polishing silicon wafers

ROHM & HAAS ELECT MAT24 citations90
US9064806B1Jun 23, 2015

Soft and conditionable chemical mechanical polishing pad with window

ROHM & HAAS ELECT MAT13 citations82
US9102034B2Aug 11, 2015

Method of chemical mechanical polishing a substrate

ROHM & HAAS ELECT MAT8 citations81
US9144880B2Sep 29, 2015

Soft and conditionable chemical mechanical polishing pad

ROHM & HAAS ELECT MAT4 citations72
US9238295B2Jan 19, 2016

Soft and conditionable chemical mechanical window polishing pad

ROHM & HAAS ELECT MAT2 citations60
US9238296B2Jan 19, 2016

Multilayer chemical mechanical polishing pad stack with soft and conditionable polishing layer

ROHM & HAAS ELECT MAT2 citations60
US9216489B2Dec 22, 2015

Chemical mechanical polishing pad with endpoint detection window

ROHM & HAAS ELECT MAT1 citations52
US9233451B2Jan 12, 2016

Soft and conditionable chemical mechanical polishing pad stack

ROHM & HAAS ELECT MAT1 citations50
US9108290B2Aug 18, 2015

Multilayer chemical mechanical polishing pad

ROHM & HAAS ELECT MAT0 citations39

DEGROOT MARTY W

3 patents

KIMBALL GREGORY M

2 patents

ELOWE PAUL R

1 patent

FEIST REBEKAH K

1 patent