Inventor
WANK ANDREW
US12 patents
Patents
12 patentsUS9586304B2Mar 7, 2017
Controlled-expansion CMP PAD casting method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC7 citations83
US9737971B2Aug 22, 2017
Chemical mechanical polishing pad, polishing layer analyzer and method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC4 citations66
US11524390B2Dec 13, 2022
Methods of making chemical mechanical polishing layers having improved uniformity
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations47
US10144115B2Dec 4, 2018
Method of making polishing layer for chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10105825B2Oct 23, 2018
Method of making polishing layer for chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10092998B2Oct 9, 2018
Method of making composite polishing layer for chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10011002B2Jul 3, 2018
Method of making composite polishing layer for chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10005172B2Jun 26, 2018
Controlled-porosity method for forming polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US9776300B2Oct 3, 2017
Chemical mechanical polishing pad and method of making same
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US9586305B2Mar 7, 2017
Chemical mechanical polishing pad and method of making same
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10272541B2Apr 30, 2019
Polishing layer analyzer and method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations35
US9770808B2Sep 26, 2017
Method of manufacturing chemical mechanical polishing pads
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations35