Inventor
WANG CHIH-CHIEN
TW18 patents
⚠️ This page may combine multiple inventors who share the name “WANG CHIH-CHIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS9875892B2Jan 23, 2018
Method of forming a photoresist layer
TAIWAN SEMICONDUCTOR MFG CO LTD70 citations97
US10121811B1Nov 6, 2018
Method of high-aspect ratio pattern formation with submicron pixel pitch
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations83
US10090357B2Oct 2, 2018
Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10734436B2Aug 4, 2020
Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10546889B2Jan 28, 2020
Method of high-aspect ratio pattern formation with submicron pixel pitch
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations72
US10186542B1Jan 22, 2019
Patterning for substrate fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11769662B2Sep 26, 2023
Method for reducing charging of semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11086221B2Aug 10, 2021
Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12165867B2Dec 10, 2024
Method for reducing charging of semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US9791775B2Oct 17, 2017
Lithography process on high topology features
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
TAIWAN SEMICONDUCTOR MFG
3 patentsUS9285677B2Mar 15, 2016
Lithography process on high topology features
TAIWAN SEMICONDUCTOR MFG2 citations61
US9153620B2Oct 6, 2015
Method of fabricating a metal grid for semiconductor device
TAIWAN SEMICONDUCTOR MFG2 citations60
US9360755B2Jun 7, 2016
Thickening phase for spin coating process
TAIWAN SEMICONDUCTOR MFG0 citations41