Inventor
PARK KEUN HEE
KR4 patents
Patents
4 patentsUS11004677B2May 11, 2021
Method for forming metal oxide layer, and plasma-enhanced chemical vapor deposition device
SAMSUNG DISPLAY CO LTD0 citations60
US11268192B2Mar 8, 2022
Thin film processing apparatus and thin film processing method
SAMSUNG DISPLAY CO LTD1 citations56
US11362162B2Jun 14, 2022
Method of manufacturing metal oxide film and display device including metal oxide film
SAMSUNG DISPLAY CO LTD0 citations47
US10679858B2Jun 9, 2020
Deposition apparatus and deposition method
SAMSUNG DISPLAY CO LTD0 citations39