Inventor
KOPACZ UWE
DE4 patents
Patents
4 patentsUS5022978AJun 11, 1991
Apparatus for coating three dimensional substrates by means of cathode sputtering
LEYBOLD AG33 citations88
US5407548AApr 18, 1995
Method for coating a substrate of low resistance to corrosion
LEYBOLD AG14 citations71
US5277778AJan 11, 1994
Method for coating components or shapes by cathode sputtering
LEYBOLD AG18 citations71
US5283435AFeb 1, 1994
Apparatus for determining the concentration of a gas in a vacuum chamber
LEYBOLD AG1 citations47