Inventor
PIKE CHRISTOPHER L
US7 patents
Patents
7 patentsUS6420097B1Jul 16, 2002
Hardmask trim process
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US6257446B1Jul 10, 2001
Liquid chemical container with integrated fluid reservoir
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US6240874B1Jun 5, 2001
Integrated edge exposure and hot/cool plate for a wafer track system
ADVANCED MICRO DEVICES INC30 citations90
US6475905B1Nov 5, 2002
Optimization of organic bottom anti-reflective coating (BARC) thickness for dual damascene process
ADVANCED MICRO DEVICES INC16 citations83
US6100505AAug 8, 2000
Hotplate offset ring
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US6326319B1Dec 4, 2001
Method for coating ultra-thin resist films
ADVANCED MICRO DEVICES INC4 citations62
US6281130B1Aug 28, 2001
Method for developing ultra-thin resist films
ADVANCED MICRO DEVICES INC6 citations60