Inventor

NAWATA YOSHIKAZU

JP2 patents

Patents

2 patents

US6353201B1Mar 5, 2002

Discharge electrode, RF plasma generation apparatus using the same, and power supply method

MITSUBISHI HEAVY IND LTD88 citations95

US7906365B2Mar 15, 2011

Method of manufacturing solar cell panel

MITSUBISHI HEAVY IND LTD6 citations55