Inventor

HAO JING AN

CN6 patents

⚠️ This page may combine multiple inventors who share the name “HAO JING AN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMICONDUCTOR MFG INT CORP

2 patents

US9223229B2Dec 29, 2015

Exposure device and exposure method

SEMICONDUCTOR MFG INT CORP1 citations49

US9134624B2Sep 15, 2015

Lithography machine and scanning and exposing method thereof

SEMICONDUCTOR MFG INT CORP0 citations39

SEMICONDUCTOR MFG INT SHANGHAI CORP

2 patents

US9606451B2Mar 28, 2017

Exposure apparatus, photolithographical reticles and exposure methods thereof

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations40

US10048603B2Aug 14, 2018

Alignment method and alignment system thereof

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations39

SEMICONDUCTOR MFG INT BEIJING CORP

1 patent

US9646865B1May 9, 2017

Interconnection structure, fabricating method thereof, and exposure alignment system

SEMICONDUCTOR MFG INT BEIJING CORP6 citations71

SEMICONDUCTOR MFG INT SHANGHAI

1 patent

US9298103B2Mar 29, 2016

Cylindrical reticle system, exposure apparatus and exposure method

SEMICONDUCTOR MFG INT SHANGHAI0 citations50