Inventor

TERAKURA SATOSHI

JP3 patents

Patents

3 patents

US10157750B2Dec 18, 2018

Plasma processing method and plasma processing apparatus

HITACHI HIGH TECH CORP2 citations70

US11532484B2Dec 20, 2022

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP0 citations60

US9905431B2Feb 27, 2018

Dry etching method

HITACHI HIGH TECH CORP0 citations44