Inventor
YAVELBERG SIMON
US37 patents
⚠️ This page may combine multiple inventors who share the name “YAVELBERG SIMON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
36 patentsUS6367410B1Apr 9, 2002
Closed-loop dome thermal control apparatus for a semiconductor wafer processing system
APPLIED MATERIALS INC620 citations96
US6326597B1Dec 4, 2001
Temperature control system for process chamber
APPLIED MATERIALS INC659 citations96
US7044832B2May 16, 2006
Load cup for chemical mechanical polishing
APPLIED MATERIALS INC61 citations94
US7241203B1Jul 10, 2007
Six headed carousel
APPLIED MATERIALS INC26 citations92
US5767781AJun 16, 1998
Method for detection of failed heater in a daisy chain connection
APPLIED MATERIALS INC19 citations92
US9878421B2Jan 30, 2018
Chemical mechanical polishing retaining ring with integrated sensor
APPLIED MATERIALS INC5 citations84
US9339914B2May 17, 2016
Substrate polishing and fluid recycling system
APPLIED MATERIALS INC11 citations84
US10500695B2Dec 10, 2019
Retaining ring having inner surfaces with features
APPLIED MATERIALS INC9 citations83
US5775379AJul 7, 1998
Insulation jacket for fluid carrying conduits
APPLIED MATERIALS INC17 citations80
US6369493B1Apr 9, 2002
Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket
APPLIED MATERIALS INC9 citations74
US5641359AJun 24, 1997
Process gas delivery system
APPLIED MATERIALS INC5 citations74
US9403256B2Aug 2, 2016
Recording measurements by sensors for a carrier head
APPLIED MATERIALS INC5 citations73
US12048981B2Jul 30, 2024
Retaining ring having inner surfaces with features
APPLIED MATERIALS INC1 citations72
US11453099B2Sep 27, 2022
Retaining ring having inner surfaces with features
APPLIED MATERIALS INC3 citations72
US5716877AFeb 10, 1998
Process gas delivery system
APPLIED MATERIALS INC3 citations63
US12434348B2Oct 7, 2025
Retaining ring having inner surfaces with features
APPLIED MATERIALS INC0 citations62
US10946496B2Mar 16, 2021
Chemical mechanical polishing retaining ring with integrated sensor
APPLIED MATERIALS INC1 citations62
US10290459B2May 14, 2019
Magnetron having enhanced cooling characteristics
APPLIED MATERIALS INC1 citations62
US10553473B2Feb 4, 2020
Edge ring for a substrate processing chamber
APPLIED MATERIALS INC1 citations61
US12330260B2Jun 17, 2025
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations60
US11618124B2Apr 4, 2023
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations60
US11417561B2Aug 16, 2022
Edge ring for a substrate processing chamber
APPLIED MATERIALS INC0 citations60
US11446740B2Sep 20, 2022
Multiple sequential linear powder dispensers for additive manufacturing
APPLIED MATERIALS INC0 citations52
US10141153B2Nov 27, 2018
Magnetron having enhanced cooling characteristics
APPLIED MATERIALS INC0 citations52
US9731399B2Aug 15, 2017
Coated retaining ring
APPLIED MATERIALS INC0 citations52
US9384122B2Jul 5, 2016
High sampling rate sensor buffering in semiconductor processing systems
APPLIED MATERIALS INC0 citations52
US10656100B2May 19, 2020
Surface acoustic wave sensors in semiconductor processing equipment
APPLIED MATERIALS INC0 citations51
US10094788B2Oct 9, 2018
Surface acoustic wave sensors in semiconductor processing equipment
APPLIED MATERIALS INC0 citations51
US9744640B2Aug 29, 2017
Corrosion resistant retaining rings
APPLIED MATERIALS INC0 citations51
US10744618B2Aug 18, 2020
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations50
US9731397B2Aug 15, 2017
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations50
US8961266B2Feb 24, 2015
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations50
US7407433B2Aug 5, 2008
Pad characterization tool
APPLIED MATERIALS INC0 citations50
US10513008B2Dec 24, 2019
Chemical mechanical polishing smart ring
APPLIED MATERIALS INC0 citations47
US10029346B2Jul 24, 2018
External clamp ring for a chemical mechanical polishing carrier head
APPLIED MATERIALS INC1 citations45
US10399202B2Sep 3, 2019
Retaining ring for lower wafer defects
APPLIED MATERIALS INC0 citations41