Inventor
HSIN PIN-YI
TW10 patents
⚠️ This page may combine multiple inventors who share the name “HSIN PIN-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
6 patentsUS6569777B1May 27, 2003
Plasma etching method to form dual damascene with improved via profile
TAIWAN SEMICONDUCTOR MFG105 citations94
US6498106B1Dec 24, 2002
Prevention of defects formed in photoresist during wet etching
TAIWAN SEMICONDUCTOR MFG19 citations91
US7015089B2Mar 21, 2006
Method to improve etching of resist protective oxide (RPO) to prevent photo-resist peeling
TAIWAN SEMICONDUCTOR MFG23 citations90
US6444587B1Sep 3, 2002
Plasma etch method incorporating inert gas purge
TAIWAN SEMICONDUCTOR MFG10 citations72
US6833233B2Dec 21, 2004
Deep UV-resistant photoresist plug for via hole
TAIWAN SEMICONDUCTOR MFG3 citations60
US7001784B2Feb 21, 2006
Method to control spacer width
TAIWAN SEMICONDUCTOR MFG0 citations33
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS11545382B2Jan 3, 2023
Integrated chip die carrier exchanger
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10665489B2May 26, 2020
Integrated chip die carrier exchanger
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12217989B2Feb 4, 2025
Semiconductor apparatus and method of collecting residues
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10861761B2Dec 8, 2020
Semiconductor packaged wafer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations38