Inventor

HARYONO MARCO

DE2 patents

Patents

2 patents

US11603378B2Mar 14, 2023

Azole silane compound

ATOTECH DEUTSCHLAND GMBH0 citations53

US10077498B2Sep 18, 2018

Method for depositing a copper seed layer onto a barrier layer and copper plating bath

ATOTECH DEUTSCHLAND GMBH0 citations38