Inventor
FREIBERGER PHILIP E
US3 patents
Patents
3 patentsUS5104819AApr 14, 1992
Fabrication of interpoly dielctric for EPROM-related technologies
INTEL CORP173 citations96
US5219791AJun 15, 1993
TEOS intermetal dielectric preclean for VIA formation
INTEL CORP41 citations89
US5139971AAug 18, 1992
Anneal to decrease moisture absorbance of intermetal dielectrics
INTEL CORP50 citations89