Inventor

STECKERT DANIEL

US2 patents

Patents

2 patents

US6107172AAug 22, 2000

Controlled linewidth reduction during gate pattern formation using an SiON BARC

ADVANCED MICRO DEVICES INC54 citations91

US5965461AOct 12, 1999

Controlled linewidth reduction during gate pattern formation using a spin-on barc

ADVANCED MICRO DEVICES INC45 citations91