Inventor
SHEU JENG-JIING
TW2 patents
Patents
2 patentsUS6309895B1Oct 30, 2001
Method for fabricating capacitor containing amorphous and polycrystalline ferroelectric films and method for forming amorphous ferroelectric film
PREC INSTR DEV CT NAT SCIENCE62 citations93
US6514814B2Feb 4, 2003
Capacitor containing amorphous and polycrystalline ferroelectric films and fabrication method therefor, and method for forming amorphous ferroelectric film
PREC INSTR DEV CT NAT SCIENCE2 citations60