Inventor
TOUYA TAKANAO
JP23 patents
⚠️ This page may combine multiple inventors who share the name “TOUYA TAKANAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
20 patentsUS9373424B2Jun 21, 2016
Electron beam writing apparatus and electron beam writing method
NUFLARE TECHNOLOGY INC17 citations83
US9236223B2Jan 12, 2016
Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
NUFLARE TECHNOLOGY INC5 citations83
US8816276B2Aug 26, 2014
Electron beam writing apparatus and electron beam writing method
NUFLARE TECHNOLOGY INC17 citations83
US10998164B2May 4, 2021
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC2 citations73
US9916962B2Mar 13, 2018
Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method
NUFLARE TECHNOLOGY INC2 citations73
US9343266B2May 17, 2016
Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table
NUFLARE TECHNOLOGY INC3 citations73
US8927941B2Jan 6, 2015
Multi charged particle beam writing apparatus and multi charged particle beam writing method with fixed voltage ratio einzel lens
NUFLARE TECHNOLOGY INC6 citations73
US9824849B2Nov 21, 2017
Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
NUFLARE TECHNOLOGY INC3 citations72
US9406117B2Aug 2, 2016
Inspection system and method for inspecting line width and/or positional errors of a pattern
NUFLARE TECHNOLOGY INC3 citations72
US8884254B2Nov 11, 2014
Charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC3 citations63
US8835868B2Sep 16, 2014
Multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC2 citations63
US12009175B2Jun 11, 2024
Charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations62
US11145483B2Oct 12, 2021
Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations62
US10504686B2Dec 10, 2019
Charged particle beam writing method and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC1 citations62
US10224171B2Mar 5, 2019
Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus
NUFLARE TECHNOLOGY INC1 citations62
US11908659B2Feb 20, 2024
Multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations60
US11804360B2Oct 31, 2023
Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus
NUFLARE TECHNOLOGY INC0 citations60
US12592360B2Mar 31, 2026
Multi charged particle beam writing method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations52
US8791422B2Jul 29, 2014
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations52
US10192712B2Jan 29, 2019
Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations51
TOUYA TAKANAO
3 patentsUS9036896B2May 19, 2015
Inspection system and method for inspecting line width and/or positional errors of a pattern
TOUYA TAKANAO11 citations82
US8067753B2Nov 29, 2011
Electron beam writing apparatus and method
TOUYA TAKANAO7 citations82
US8610096B2Dec 17, 2013
Charged particle beam writing apparatus and method
TOUYA TAKANAO4 citations61