Inventor
MITSUOKA KAZUYUKI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “MITSUOKA KAZUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS10115609B2Oct 30, 2018
Separation and regeneration apparatus and substrate processing apparatus
TOKYO ELECTRON LTD6 citations73
US10046370B2Aug 14, 2018
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium
TOKYO ELECTRON LTD3 citations73
US9662685B2May 30, 2017
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium
TOKYO ELECTRON LTD5 citations73
US9583330B2Feb 28, 2017
Supercritical drying method for semiconductor substrate and supercritical drying apparatus
TOKYO ELECTRON LTD2 citations73
US7005660B2Feb 28, 2006
Surface processing apparatus
TOKYO ELECTRON LTD8 citations73
US9953840B2Apr 24, 2018
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD5 citations72
US9881784B2Jan 30, 2018
Substrate processing method, substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD4 citations72
US10207349B2Feb 19, 2019
High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container
TOKYO ELECTRON LTD1 citations62
US7195936B2Mar 27, 2007
Thin film processing method and system
TOKYO ELECTRON LTD4 citations62
US7348129B2Mar 25, 2008
Electron beam processing method and apparatus
TOKYO ELECTRON LTD0 citations51
US7521098B2Apr 21, 2009
Method of processing an organic-film
TOKYO ELECTRON LTD0 citations41
US7473567B2Jan 6, 2009
Change rate prediction method, storage medium, and substrate processing system
TOKYO ELECTRON LTD0 citations41