Inventor
SAKAGAWA HIDEO
JP3 patents
Patents
3 patentsUS6906542B2Jun 14, 2005
Probing method and prober
TOKYO ELECTRON LTD69 citations95
US7417445B2Aug 26, 2008
Probing method and prober for measuring electrical characteristics of circuit devices
TOKYO ELECTRON LTD6 citations71
US5034684AJul 23, 1991
Probe device and method of controlling the same
TOKYO ELECTRON LTD4 citations59