Inventor
LUTTIKHUIS BERNARDUS ANTONIUS
NL16 patents
Patents
16 patentsUS7483120B2Jan 27, 2009
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
ASML NETHERLANDS BV121 citations98
US7253875B1Aug 7, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV166 citations98
US7724351B2May 25, 2010
Lithographic apparatus, device manufacturing method and exchangeable optical element
ASML NETHERLANDS BV12 citations89
US7545478B2Jun 9, 2009
Lithographic apparatus, thermal conditioning system, and method for manufacturing a device
ASML NETHERLANDS BV12 citations79
US7538857B2May 26, 2009
Lithographic apparatus and device manufacturing method utilizing a substrate handler
ASML NETHERLANDS BV7 citations72
US6977713B2Dec 20, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7656506B2Feb 2, 2010
Lithographic apparatus and device manufacturing method utilizing a substrate handler
ASML NETHERLANDS BV2 citations61
US7576835B2Aug 18, 2009
Substrate handler, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7522258B2Apr 21, 2009
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination
ASML NETHERLANDS BV3 citations60
US7471373B2Dec 30, 2008
Lithographic apparatus with patterning device position determination
ASML NETHERLANDS BV3 citations60
US7130019B2Oct 31, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations60
US7126664B2Oct 24, 2006
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV4 citations60
US7352438B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51
US7256867B2Aug 14, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7375795B2May 20, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV1 citations50
US7061579B2Jun 13, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48