Inventor
SHIMANE HIDEKI
JP5 patents
Patents
5 patentsUS7138734B2Nov 21, 2006
Linear drive unit reducing stress generated in movable part in horizontal direction
HITACHI LTD12 citations80
US7004694B2Feb 28, 2006
Linear drive apparatus
HITACHI LTD6 citations72
US7777371B2Aug 17, 2010
Linear drive apparatus having cores and coils which are positioned on opposite sides of the cores
HITACHI LTD2 citations61
US6876108B2Apr 5, 2005
Linear motor, its controlling method, and XY table
HITACHI LTD6 citations61
US6975048B2Dec 13, 2005
Drive apparatus and XY table utilizing the same
HITACHI LTD3 citations60