Inventor
ARNEPALLI RANGA RAO
IN13 patents
⚠️ This page may combine multiple inventors who share the name “ARNEPALLI RANGA RAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS10017856B1Jul 10, 2018
Flowable gapfill using solvents
APPLIED MATERIALS INC340 citations98
US10043684B1Aug 7, 2018
Self-limiting atomic thermal etching systems and methods
APPLIED MATERIALS INC96 citations95
US10515927B2Dec 24, 2019
Methods and apparatus for semiconductor package processing
APPLIED MATERIALS INC2 citations72
US10273577B2Apr 30, 2019
Low vapor pressure aerosol-assisted CVD
APPLIED MATERIALS INC2 citations72
US9673042B2Jun 6, 2017
Methods and apparatus for in-situ cleaning of copper surfaces and deposition and removal of self-assembled monolayers
APPLIED MATERIALS INC6 citations72
US10319601B2Jun 11, 2019
Slurry for polishing of integrated circuit packaging
APPLIED MATERIALS INC1 citations62
US11980992B2May 14, 2024
Integrated abrasive polishing pads and manufacturing methods
APPLIED MATERIALS INC0 citations61
US11471999B2Oct 18, 2022
Integrated abrasive polishing pads and manufacturing methods
APPLIED MATERIALS INC1 citations61
US11598000B2Mar 7, 2023
Method, materials and process for native oxide removal and regrowth of dielectric oxides for better biosensor performance
APPLIED MATERIALS INC0 citations59
US10326067B2Jun 18, 2019
Methods to synthesize single source precursors and methods to deposit nanowire based thin films for high efficiency thermoelectric devices
APPLIED MATERIALS INC0 citations51
US10280507B2May 7, 2019
Flowable gapfill using solvents
APPLIED MATERIALS INC0 citations51
US10163629B2Dec 25, 2018
Low vapor pressure aerosol-assisted CVD
APPLIED MATERIALS INC0 citations51