Inventor
THAKARE DARSHAN
IN8 patents
Patents
8 patentsUS10017856B1Jul 10, 2018
Flowable gapfill using solvents
APPLIED MATERIALS INC340 citations98
US11540432B2Dec 27, 2022
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC1 citations70
US11359282B2Jun 14, 2022
Methods for forming impurity free metal alloy films
APPLIED MATERIALS INC1 citations62
US12564012B2Feb 24, 2026
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US12004337B2Jun 4, 2024
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US11547030B2Jan 3, 2023
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US10280507B2May 7, 2019
Flowable gapfill using solvents
APPLIED MATERIALS INC0 citations51
US11390947B2Jul 19, 2022
Method of forming a fluorinated metal film
APPLIED MATERIALS INC0 citations48