Inventor
GORADIA PRERNA SONTHALIA
IN23 patents
Patents
23 patentsUS10017856B1Jul 10, 2018
Flowable gapfill using solvents
APPLIED MATERIALS INC340 citations98
US9903020B2Feb 27, 2018
Generation of compact alumina passivation layers on aluminum plasma equipment components
APPLIED MATERIALS INC108 citations96
US10043684B1Aug 7, 2018
Self-limiting atomic thermal etching systems and methods
APPLIED MATERIALS INC96 citations95
US9991129B1Jun 5, 2018
Selective etching of amorphous silicon over epitaxial silicon
APPLIED MATERIALS INC9 citations83
US10273577B2Apr 30, 2019
Low vapor pressure aerosol-assisted CVD
APPLIED MATERIALS INC2 citations72
US10074559B1Sep 11, 2018
Selective poreseal deposition prevention and residue removal using SAM
APPLIED MATERIALS INC5 citations72
US12322592B2Jun 3, 2025
Deposition of silicon-based dielectric films
APPLIED MATERIALS INC0 citations62
US10573527B2Feb 25, 2020
Gas-phase selective etching systems and methods
APPLIED MATERIALS INC1 citations62
US10886137B2Jan 5, 2021
Selective nitride removal
APPLIED MATERIALS INC0 citations61
US12134822B2Nov 5, 2024
Cleaning materials and processes for lithium processing equipment
APPLIED MATERIALS INC0 citations60
US11926903B2Mar 12, 2024
Etching of alkali metal compounds
APPLIED MATERIALS INC0 citations60
US12272607B2Apr 8, 2025
Method of enhancing contrast while imaging high aspect ratio structures in electron microscopy
APPLIED MATERIALS INC0 citations59
US12216243B2Feb 4, 2025
Air-spaced encapsulated dielectric nanopillars for flat optical devices
APPLIED MATERIALS INC0 citations59
US11739429B2Aug 29, 2023
Methods for refurbishing aerospace components
APPLIED MATERIALS INC1 citations59
US11702744B2Jul 18, 2023
Metal oxyfluoride film formation methods
APPLIED MATERIALS INC0 citations59
US10497573B2Dec 3, 2019
Selective atomic layer etching of semiconductor materials
APPLIED MATERIALS INC0 citations51
US10280507B2May 7, 2019
Flowable gapfill using solvents
APPLIED MATERIALS INC0 citations51
US10163629B2Dec 25, 2018
Low vapor pressure aerosol-assisted CVD
APPLIED MATERIALS INC0 citations51
US11976357B2May 7, 2024
Methods for forming a protective coating on processing chamber surfaces or components
APPLIED MATERIALS INC0 citations50
US12297367B2May 13, 2025
Encapsulation materials for flat optical devices
APPLIED MATERIALS INC0 citations49
US11424134B2Aug 23, 2022
Atomic layer etching of metals
APPLIED MATERIALS INC0 citations49
US11931855B2Mar 19, 2024
Planarization methods for packaging substrates
APPLIED MATERIALS INC0 citations48
US11390947B2Jul 19, 2022
Method of forming a fluorinated metal film
APPLIED MATERIALS INC0 citations48