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Inventor
ZENG LIZHAN
CN
2 patents
Patents
2 patents
US9920790B2
Mar 20, 2018
Active airbearing device
UNIV HUAZHONG SCIENCE TECH
1 citations
48
US12149143B2
Nov 19, 2024
Magnetic levitation planar motor workbench having double-layer winding of coarse and fine drive
UNIV HUAZHONG SCIENCE TECH
0 citations
47