Inventor
PITNER GREGORY MICHAEL
US4 patents
Patents
4 patentsUS12174526B2Dec 24, 2024
Pellicle for an EUV lithography mask and a method of manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12151213B2Nov 26, 2024
Method of manufacturing semiconductor devices including the steps of removing one or more of the nanotubes from the stack of nanotubes, and/or removing spacers that surrounds each of the plurality of nanotubes, and forming gate dielectric and/or gate electrode to the nanotubes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11749528B2Sep 5, 2023
Method of manufacturing semiconductor devices including the steps of removing a plurality of spacers that surrounds each of the plurality of nanotubes into a layer of nanotubes, and forming gate dielectric and/or gate electrode
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11342181B2May 24, 2022
Semiconductor devices and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60