Inventor
KOUNO MOTOHIRO
JP7 patents
Patents
7 patentsUS5233291AAug 3, 1993
Method of and apparatus for measuring electric characteristics of semiconductor wafer
DAINIPPON SCREEN MFG59 citations94
US5568252AOct 22, 1996
Method and apparatus for measuring insulation film thickness of semiconductor wafer
DAINIPPON SCREEN MFG30 citations91
US5475319ADec 12, 1995
Method of measuring electric charge of semiconductor wafer
DAINIPPON SCREEN MFG20 citations91
US5239183AAug 24, 1993
Optical gap measuring device using frustrated internal reflection
DAINIPPON SCREEN MFG28 citations91
US5225690AJul 6, 1993
Gap measuring device and method using frustrated internal reflection
DAINIPPON SCREEN MFG25 citations91
US5554939ASep 10, 1996
Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same
DAINIPPON SCREEN MFG14 citations73
US5444389AAug 22, 1995
Method and apparatus for measuring lifetime of minority carriers in semiconductor
DAINIPPON SCREEN MFG9 citations73