Inventor

TAKAMI SHOU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “TAKAMI SHOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

2 patents

US6872944B2Mar 29, 2005

Scanning electron microscope

HITACHI LTD24 citations92

US6667476B2Dec 23, 2003

Scanning electron microscope

HITACHI LTD40 citations92

HITACHI HIGH TECH CORP

2 patents

US10101150B2Oct 16, 2018

Height measurement device and charged particle beam device

HITACHI HIGH TECH CORP1 citations51

US10393509B2Aug 27, 2019

Pattern height measurement device and charged particle beam device

HITACHI HIGH TECH CORP0 citations40