Inventor
NAKAYASHIKI HIROYUKI
JP2 patents
Patents
2 patentsUS7081758B2Jul 25, 2006
Inspection pattern, inspection method, and inspection system for detection of latent defect of multi-layer wiring structure
OKI ELECTRIC IND CO LTD13 citations80
US6884637B2Apr 26, 2005
Inspection pattern, inspection method, and inspection system for detection of latent defect of multi-layer wiring structure
OKI ELECTRIC IND CO LTD12 citations80