Inventor
WILLIAMS DAMON V
US2 patents
Patents
2 patentsUS6937915B1Aug 30, 2005
Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
LAM RES CORP11 citations72
US6925348B2Aug 2, 2005
Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
LAM RES CORP9 citations72