Inventor
SHIMONISHI SATOSHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SHIMONISHI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS6303466B1Oct 16, 2001
Method of manufacturing a semiconductor device
TOSHIBA KK17 citations81
US6685797B2Feb 3, 2004
Semiconductor device manufacturing system for etching a semiconductor by plasma discharge
TOSHIBA KK10 citations72
US7067761B2Jun 27, 2006
Semiconductor device manufacturing system for etching a semiconductor by plasma discharge
TOSHIBA KK0 citations51
US6989073B2Jan 24, 2006
Semiconductor device manufacturing system for etching a semiconductor by plasma discharge
TOSHIBA KK0 citations51