Inventor

BIJNEN FRANSISCUS GODEFRIDUS CASPER

NL3 patents

Patents

3 patents

US7459247B2Dec 2, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV34 citations90

US7477403B2Jan 13, 2009

Optical position assessment apparatus and method

ASML NETHERLANDS BV8 citations82

US7751047B2Jul 6, 2010

Alignment and alignment marks

ASML NETHERLANDS BV8 citations81