Inventor
VOSTERS PETRUS MATTHIJS HENRICUS
NL6 patents
⚠️ This page may combine multiple inventors who share the name “VOSTERS PETRUS MATTHIJS HENRICUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7538857B2May 26, 2009
Lithographic apparatus and device manufacturing method utilizing a substrate handler
ASML NETHERLANDS BV7 citations72
US7656506B2Feb 2, 2010
Lithographic apparatus and device manufacturing method utilizing a substrate handler
ASML NETHERLANDS BV2 citations61
US7456935B2Nov 25, 2008
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table
ASML NETHERLANDS BV3 citations61
US7576835B2Aug 18, 2009
Substrate handler, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60