Inventor

HAZENBERG JOHANNES MARTINUS ANDREAS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “HAZENBERG JOHANNES MARTINUS ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7724351B2May 25, 2010

Lithographic apparatus, device manufacturing method and exchangeable optical element

ASML NETHERLANDS BV12 citations89

US7576835B2Aug 18, 2009

Substrate handler, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations60

VAN DER SCHOOT HARMEN KLAAS

1 patent

US8174680B2May 8, 2012

Substrate handler, lithographic apparatus and device manufacturing method

VAN DER SCHOOT HARMEN KLAAS0 citations42