Inventor
NUKAGA JIROU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NUKAGA JIROU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NITTO DENKO CORP
4 patentsUS9131829B2Sep 15, 2015
Label sheet for cleaning and conveying member having cleaning function
NITTO DENKO CORP8 citations83
US7712177B2May 11, 2010
Cleaning sheet and its production method as well as transporting member having such cleaning sheet
NITTO DENKO CORP13 citations81
US7713356B2May 11, 2010
Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
NITTO DENKO CORP7 citations73
US7793668B2Sep 14, 2010
Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
NITTO DENKO CORP5 citations59