Inventor
JANG SOO OUK
KR3 patents
⚠️ This page may combine multiple inventors who share the name “JANG SOO OUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOREA INST OF FUSION ENERGY
2 patentsUS11776819B2Oct 3, 2023
Point etching module using annular surface dielectric barrier discharge apparatus and method for control etching profile of point etching module
KOREA INST OF FUSION ENERGY0 citations56
US11268191B2Mar 8, 2022
Atomic layer polishing method and device therefor
KOREA INST OF FUSION ENERGY0 citations47