Inventor
INGLE NITIN KRISHNARAO
US3 patents
Patents
3 patentsUS10113236B2Oct 30, 2018
Batch curing chamber with gas distribution and individual pumping
APPLIED MATERIALS INC2 citations71
US11408075B2Aug 9, 2022
Batch curing chamber with gas distribution and individual pumping
APPLIED MATERIALS INC0 citations61
US10825665B2Nov 3, 2020
Directional treatment for multi-dimensional device processing
APPLIED MATERIALS INC1 citations61