Inventor

YUMOTO TOMOYUKI

JP2 patents

Patents

2 patents

US10121685B2Nov 6, 2018

Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus

TOKYO ELECTRON LTD5 citations68

US10655619B2May 19, 2020

Pump, pump device, and liquid supply system

TOKYO ELECTRON LTD0 citations36