Inventor

NUNOMURA ICHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NUNOMURA ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

1 patent

US10452856B2Oct 22, 2019

Processing apparatus, controller and processing system

HITACHI INT ELECTRIC INC0 citations46

KOKUSAI ELECTRIC CORP

1 patent

US11521880B2Dec 6, 2022

Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber

KOKUSAI ELECTRIC CORP0 citations40

OZAKI YUKIO

1 patent

US8457774B2Jun 4, 2013

Substrate processing apparatus, control method of the substrate processing apparatus, manufacturing method of semiconductor device and apparatus state shifting method

OZAKI YUKIO0 citations34