Inventor
HAYASAKA TORU
JP4 patents
Patents
4 patentsUS11742181B2Aug 29, 2023
Control method and plasma processing apparatus
TOKYO ELECTRON LTD5 citations85
US11476089B2Oct 18, 2022
Control method and plasma processing apparatus
TOKYO ELECTRON LTD7 citations85
US12165842B2Dec 10, 2024
Control method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US11742182B2Aug 29, 2023
Control method and plasma processing apparatus
TOKYO ELECTRON LTD3 citations72