Inventor
KANE PETER E
US3 patents
⚠️ This page may combine multiple inventors who share the name “KANE PETER E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
1366 TECH INC
2 patentsUS10549476B2Feb 4, 2020
Methods and apparati for handling, heating and cooling a substrate upon which a pattern is made by a tool in heat flowable material coating, including substrate transport, tool laydown, tool tensioning and tool retraction
1366 TECH INC7 citations78
US9815072B2Nov 14, 2017
Apparatus for depositing a thin layer of polymer resist on a substrate
1366 TECH INC0 citations37