Inventor

STOLL HELMUT

DE4 patents

Patents

4 patents

US5224202AJun 29, 1993

Apparatus for the evaporation of liquids

LEYBOLD AG53 citations93

US5318928AJun 7, 1994

Method for the surface passivation of sensors using an in situ sputter cleaning step prior to passivation film deposition

LEYBOLD AG34 citations88

US4987010AJan 22, 1991

Method for manufacturing a film resistor

LEYBOLD AG6 citations71

US5498291AMar 12, 1996

Arrangement for coating or etching substrates

LEYBOLD AG2 citations60