Inventor
KANEKO KAZUSHI
JP30 patents
Patents
30 patentsUS9418822B2Aug 16, 2016
Plasma processing apparatus, plasma processing method and high frequency generator
TOKYO ELECTRON LTD29 citations93
US10748746B2Aug 18, 2020
Microwave output device and plasma processing apparatus
TOKYO ELECTRON LTD42 citations91
US11094507B2Aug 17, 2021
Power generation systems and methods for plasma stability and control
TOKYO ELECTRON LTD13 citations84
US11050394B2Jun 29, 2021
Modules, multi-stage systems, and related methods for radio frequency power amplifiers
TOKYO ELECTRON LTD4 citations72
US10109463B2Oct 23, 2018
Microwave automatic matcher and plasma processing apparatus
TOKYO ELECTRON LTD3 citations72
US10074524B2Sep 11, 2018
Plasma processing apparatus and high frequency generator
TOKYO ELECTRON LTD2 citations72
US9305751B2Apr 5, 2016
Microwave plasma processing apparatus and microwave supplying method
TOKYO ELECTRON LTD4 citations72
US9241397B2Jan 19, 2016
Microwave plasma processing apparatus and microwave supply method
TOKYO ELECTRON LTD4 citations70
US12412732B2Sep 9, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11887816B2Jan 30, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11721524B2Aug 8, 2023
Power generation systems and methods for plasma stability and control
TOKYO ELECTRON LTD0 citations61
US9159536B2Oct 13, 2015
Plasma processing apparatus, abnormal oscillation determination method and high-frequency generator
TOKYO ELECTRON LTD2 citations58
US11569068B2Jan 31, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11527386B2Dec 13, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11249126B2Feb 15, 2022
Method of determining correction function
TOKYO ELECTRON LTD0 citations52
US11209515B2Dec 28, 2021
Method of determining correction function
TOKYO ELECTRON LTD0 citations52
US10971337B2Apr 6, 2021
Microwave output device and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US10796886B2Oct 6, 2020
Detection device, microwave output device and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US12191116B2Jan 7, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations51
US11587769B2Feb 21, 2023
Microwave output device and plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US11031213B2Jun 8, 2021
Microwave output device and plasma processing device
TOKYO ELECTRON LTD0 citations51
US9633821B2Apr 25, 2017
Microwave plasma processing apparatus and microwave supplying method
TOKYO ELECTRON LTD0 citations51
US9373483B2Jun 21, 2016
Plasma processing apparatus and high frequency generator
TOKYO ELECTRON LTD1 citations51
US10679826B2Jun 9, 2020
Microwave control method
TOKYO ELECTRON LTD0 citations42
US10879045B2Dec 29, 2020
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations41
US9977070B2May 22, 2018
Method for inspecting magnetron
TOKYO ELECTRON LTD0 citations41
US9875882B2Jan 23, 2018
Microwave plasma processing apparatus, slot antenna, and semiconductor device
TOKYO ELECTRON LTD0 citations41
US10510513B2Dec 17, 2019
Plasma processing device and high-frequency generator
TOKYO ELECTRON LTD0 citations40
US10847353B2Nov 24, 2020
Pulse monitor device and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38
US10662531B2May 26, 2020
Plasma processing apparatus, abnormality determination method, and microwave generator
TOKYO ELECTRON LTD0 citations38