Inventor
HASHIMOTO YUNOSUKE
JP3 patents
Patents
3 patentsUS9241397B2Jan 19, 2016
Microwave plasma processing apparatus and microwave supply method
TOKYO ELECTRON LTD4 citations70
US9159536B2Oct 13, 2015
Plasma processing apparatus, abnormal oscillation determination method and high-frequency generator
TOKYO ELECTRON LTD2 citations58
US10662531B2May 26, 2020
Plasma processing apparatus, abnormality determination method, and microwave generator
TOKYO ELECTRON LTD0 citations38