Inventor
WU KUANG-YUNG
TW4 patents
Patents
4 patentsUS6299788B1Oct 9, 2001
Silicon etching process
MOSEL VITELIC INC10 citations71
US6273962B1Aug 14, 2001
Method to reduce the particles in load-lock chamber
MOSEL VITELIC INC2 citations58
US6403489B1Jun 11, 2002
Method for removing polymer stacked on a lower electrode within an etching reaction chamber
MOSEL VITELIC INC3 citations56
US6113736ASep 5, 2000
Gas ring apparatus for semiconductor etching
MOSEL VITELIC INC5 citations56