Inventor
CHEN SSU-YU
TW21 patents
Patents
21 patentsUS11086237B2Aug 10, 2021
Extreme ultraviolet lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US12055865B2Aug 6, 2024
Extreme ultraviolet lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10955762B2Mar 23, 2021
Radiation source apparatus and method for decreasing debris in radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10877378B2Dec 29, 2020
Vessel for extreme ultraviolet radiation source
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10791616B1Sep 29, 2020
Radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10712676B2Jul 14, 2020
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10512147B1Dec 17, 2019
Extreme ultraviolet radiation source and droplet catcher thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10495987B2Dec 3, 2019
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US12379675B2Aug 5, 2025
Extreme ultraviolet lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12282262B2Apr 22, 2025
Method for controlling extreme ultraviolet light
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12235594B2Feb 25, 2025
Method for performing lithography process, light source, and EUV lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12207381B2Jan 21, 2025
Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12130556B2Oct 29, 2024
Plasma position control for extreme ultraviolet lithography light sources
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11703769B2Jul 18, 2023
Light source, EUV lithography system, and method for performing circuit layout patterning process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11650508B2May 16, 2023
Plasma position control for extreme ultraviolet lithography light sources
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11531278B2Dec 20, 2022
EUV lithography system and method for decreasing debris in EUV lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11333983B2May 17, 2022
Light source, EUV lithography system, and method for generating EUV radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11320744B2May 3, 2022
Method and apparatus for controlling extreme ultraviolet light
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11297710B2Apr 5, 2022
Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10824083B2Nov 3, 2020
Light source, EUV lithography system, and method for generating EUV radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11360392B2Jun 14, 2022
Photolithography device having illuminator and method for adjusting intensity uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49