Inventor

LEU CHEN HSIANG

TW2 patents

Patents

2 patents

US7064085B2Jun 20, 2006

Feed forward spacer width control in semiconductor manufacturing

TAIWAN SEMICONDUCTOR MFG11 citations79

US6972241B2Dec 6, 2005

Method of forming an STI feature to avoid electrical charge leakage

TAIWAN SEMICONDUCTOR MFG8 citations68