Inventor
TORII HIROOMI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TORII HIROOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
8 patentsUS7063598B2Jun 20, 2006
Substrate delivery mechanism
EBARA CORP19 citations92
US6783445B2Aug 31, 2004
Polishing apparatus
EBARA CORP22 citations92
US7445543B2Nov 4, 2008
Polishing apparatus
EBARA CORP19 citations90
US7645185B2Jan 12, 2010
Substrate delivery mechanism
EBARA CORP5 citations73
US7083506B2Aug 1, 2006
Polishing apparatus
EBARA CORP6 citations73
US6746312B2Jun 8, 2004
Polishing method and polishing apparatus
EBARA CORP9 citations73
US7160180B2Jan 9, 2007
Substrate delivery mechanism
EBARA CORP3 citations62
US7942725B2May 17, 2011
Polishing apparatus
EBARA CORP3 citations60